Products

Designed for High Performance in Production Environment while stays Efficient and Economic

Features and Benefits

• Maintenance friendly mechanical design
• State of the art modular control system, in-house designed and manufactured
• 10,4“ high-res touchscreen for operator interface
• Up to 4 stacked quartz or SiC tube reactor chambers for various procesess
• No thermal interference between different tubes
• Contactless fully automated boat-in-tube loading both cantilever or softlanding configurations
• Independent tube level control system
• HW safety interlocks independent on main CPU
• HEPA or ULPA filtres installed in load station
• Boat elevator and wafer handling automation
• UHP face seal fittings and welds for connections
• UHP orbital weldings made in 100/10 Cleanroom

Atmospheric Processes

• Diffusion (drive-in) high temperature procesess
• Doping from solid, liquid and gaseous dopant sources e.g.: BBr₃, B₂H₆, POCL₃, PH₃, BN
• Various thermal processing e.g. annealing, sintering
• Pyrogenic Wet Oxide with External Burning System
• Wet Oxide with ultra pure steamer
• Dry Oxide
• HiPOx (High Pressure Oxide)

LPCVD Processes

• Silicon nitride
• Low temperature oxide (LTO)
• High temperature oxide (HTO)
• TEOS oxide
• Polysilicon, with tilt/flat temperature profile
• Doped polysilicon
• Oxynitride

PECVD Processes

• Silicon nitride (incl. anti-reflective SiN solar cell coating)
• Silicon oxide
• Oxinitride

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DCE or HCl optional for all processes

Wafer Handling Automation

Partial automation

• Stand-alone cassette to boat wafer transfer system

 
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Full automation

• Boat elevator
• Fully automated stocker with built-in elevator and wafer transfer system

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Typical configuration for Boat Elevator is 5 boats each with 50 slots each (200 mm wafers) and 6 boats (150 mm wafers).

In case of stocker, the system includes built-in wafer handling robot and the boat elevator. The stocker is integrated into the horizontal furnace and stores loaded and unloaded cassettes for a smooth continuous and fully automatic furnace operation.